ASTM E766-1998(2008)e1 扫描电子显微镜的放大系数的标准校正规范
作者:标准资料网
时间:2024-05-03 04:16:43
浏览:8729
来源:标准资料网
下载地址: 点击此处下载
【英文标准名称】:StandardPracticeforCalibratingtheMagnificationofaScanningElectronMicroscope
【原文标准名称】:扫描电子显微镜的放大系数的标准校正规范
【标准号】:ASTME766-1998(2008)e1
【标准状态】:现行
【国别】:美国
【发布日期】:1998
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E04.11
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:calibration;magnification;pitch;scanningelectronmicroscope;Calibration--microscopes;Electronmicroscopy;Magnification;Scanningelectronmicroscope(SEM)
【摘要】:Properuseofthispracticecanyieldcalibratedmagnificationswithprecisionof5%orbetterwithinamagnificationrangeoffrom10to50000X.Theuseofcalibrationspecimenstraceabletointernational/nationalstandards,suchasNIST-SRM484,withthispracticewillyieldmagnificationsaccuratetobetterthan5%overthecalibratedrangeofoperatingconditions.Theaccuracyofthecalibratedmagnifications,ordimensionalmeasurements,willbepoorerthantheaccuracyofthecalibrationspecimenusedwiththispractice.Foraccuracyapproachingthatofthecalibrationspecimenthispracticemustbeappliedwiththeidenticaloperatingconditions(acceleratingvoltage,workingdistanceandmagnification)usedtoimagethespecimensofinterest.Itisincumbentuponeachfacilityusingthispracticetodefinethestandardrangeofmagnificationandoperatingconditionsaswellasthedesiredaccuracyforwhichthispracticewillbeapplied.Thestandardoperatingconditionsmustincludethoseparameterswhichtheoperatorcancontrolincluding:acceleratingvoltage,workingdistance,magnification,andimagingmode.1.1Thispracticecoversgeneralproceduresnecessaryforthecalibrationofmagnificationofscanningelectronmicroscopes.Therelationshipbetweentruemagnificationandindicatedmagnificationisacomplicatedfunctionofoperatingconditions.Therefore,thispracticemustbeappliedtoeachsetofstandardoperatingconditionstobeused.1.2ThevaluesstatedinSIunitsaretoberegardedasstandard.Nootherunitsofmeasurementareincludedinthisstandard.1.3Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:N33
【国际标准分类号】:37_020
【页数】:6P.;A4
【正文语种】:英语
【原文标准名称】:扫描电子显微镜的放大系数的标准校正规范
【标准号】:ASTME766-1998(2008)e1
【标准状态】:现行
【国别】:美国
【发布日期】:1998
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E04.11
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:
【英文主题词】:calibration;magnification;pitch;scanningelectronmicroscope;Calibration--microscopes;Electronmicroscopy;Magnification;Scanningelectronmicroscope(SEM)
【摘要】:Properuseofthispracticecanyieldcalibratedmagnificationswithprecisionof5%orbetterwithinamagnificationrangeoffrom10to50000X.Theuseofcalibrationspecimenstraceabletointernational/nationalstandards,suchasNIST-SRM484,withthispracticewillyieldmagnificationsaccuratetobetterthan5%overthecalibratedrangeofoperatingconditions.Theaccuracyofthecalibratedmagnifications,ordimensionalmeasurements,willbepoorerthantheaccuracyofthecalibrationspecimenusedwiththispractice.Foraccuracyapproachingthatofthecalibrationspecimenthispracticemustbeappliedwiththeidenticaloperatingconditions(acceleratingvoltage,workingdistanceandmagnification)usedtoimagethespecimensofinterest.Itisincumbentuponeachfacilityusingthispracticetodefinethestandardrangeofmagnificationandoperatingconditionsaswellasthedesiredaccuracyforwhichthispracticewillbeapplied.Thestandardoperatingconditionsmustincludethoseparameterswhichtheoperatorcancontrolincluding:acceleratingvoltage,workingdistance,magnification,andimagingmode.1.1Thispracticecoversgeneralproceduresnecessaryforthecalibrationofmagnificationofscanningelectronmicroscopes.Therelationshipbetweentruemagnificationandindicatedmagnificationisacomplicatedfunctionofoperatingconditions.Therefore,thispracticemustbeappliedtoeachsetofstandardoperatingconditionstobeused.1.2ThevaluesstatedinSIunitsaretoberegardedasstandard.Nootherunitsofmeasurementareincludedinthisstandard.1.3Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:N33
【国际标准分类号】:37_020
【页数】:6P.;A4
【正文语种】:英语
下载地址:
点击此处下载